更新時間：
產品內容
HALOCARBON 218 (C3F8)
Perfluoropropane / Octafluoropropane
Application
Halocarbon 218 is used for a chamber cleaning gas for semiconductor industry. C3F8 is used for the replacement of conventional chamber cleaning gas such as C2F6. The product was developed and commercialized in semi application by 3M.
Production Specification
Purity: 99.99%
Air < 80 ppmv
Other Organics < 10 ppmv
Acidity < 0.1 ppmv
H2O < 1 ppmw
Non-Volatile Residue <1 ppmw
Package
Cylinder
8L ~ 50L Steel Seamless Cylinder
1000L Steel Cylinder
Valve
Standard CGA valve
DISS valve
外牆汙垢高壓清洗
Perfluoropropane / Octafluoropropane
Application
Halocarbon 218 is used for a chamber cleaning gas for semiconductor industry. C3F8 is used for the replacement of conventional chamber cleaning gas such as C2F6. The product was developed and commercialized in semi application by 3M.
Production Specification
Purity: 99.99%
Air < 80 ppmv
Other Organics < 10 ppmv
Acidity < 0.1 ppmv
H2O < 1 ppmw
Non-Volatile Residue <1 ppmw
Package
Cylinder
8L ~ 50L Steel Seamless Cylinder
1000L Steel Cylinder
Valve
Standard CGA valve
DISS valve
外牆汙垢高壓清洗
公司資訊
- 統一編號28877776
- 聯絡人陳先生
- 更多元佳宇有限公司資訊
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網網相連
- 慶豐年行
- 哲恩有限公司（五金研磨拋光）
- 呈傳企業有限公司
