C4F8

更新時間:

產品內容

HALOCARBON c318 (C4F8)
Octafluorocyclobutane


Application
Halocarbon c318 is used for a chamber cleaning gas for semiconductor industry. C4F8 is used for the replacement of conventional chamber cleaning gas such as C2F6. It is also used as etching gas in semiconductor and DRAM processes.

Production Specification
Purity       
99.999%       99.995%
N2                     3                   8
O2                     1                   2
OHC                 4                   10
HF                   0.1                0.1
H2O                  1                   1
*Unit: ppm

Package
Cylinder
8L ~ 50L Steel Seamless Cylinder
1000L Steel Cylinder

Valve

Standard CGA valve
DISS valve


素鋁箔
免費註冊

公司資訊

  1. 統一編號28877776
  2. 聯絡人陳先生
  3. 更多元佳宇有限公司資訊
網頁更新日:

相關產品

  1. 盈冠氣體快捷配送02-29927468
    盈冠氣體快捷配送02-29927468
  2. 二氧化碳.CO2
  3. 氣體新竹
    氣體新竹
  4. 盈冠氣體快捷配送02-29927468
    盈冠氣體快捷配送02-29927468
  5. C4F8

網網相連

向城企業有限公司
利來福生鮮超市連鎖店
科達資訊服務公司