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產品內容
Halocarbons 2316 / Hexafluorobutadiene
Application
Halocarbon 2316 (C4F6) is mainly used for DRAM and Semiconductor industry for high aspect ration etching.
Product Specification
Purity 99.99%
Other Fluorocarbons < 400
N2+O2+Ar <50
CO2 <20
H2O <5 ppmw
Acidity (as HF) <5 ppmw
*Unit: ppm
公司資訊
- 統一編號28877776
- 聯絡人陳先生
- 更多元佳宇有限公司資訊
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